Werth Messtechnik Precision measurement of 3D micro-structures

Editor: Barbara Schulz

Germany – With several hundred installations worldwide, the patented Werth fibre probe (WFP), developed in co-operation with the PTB – German National Metrology Institute, is currently the most commonly used micro-probe, the company says.

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The probe is continuously kept in motion by an oscillator (patent pending), in order to prevent stick-slip effects.
The probe is continuously kept in motion by an oscillator (patent pending), in order to prevent stick-slip effects.
(Source: Werth)

It has been used for many years to measure micro-gears, gages, or micro-holes in fuel injectors and turbine blades. In these applications, diameters as small as 90 µm must be captured with tolerances in the single-digit micron range. Due to its very low contact force, the WFP is also said to be suitable for calibrating optical measurements on workpieces with sensitive surfaces.

By directly assessing the contact element, the WFP achieves probing uncertainties in the range of a few tenths of a micron, Werth claims. According to Werth, bending of the stylus shaft has no effect on the measurement result. Resolution is in the nanometer range, and is ultimately dependent only on the optics used. In scanning mode, the WFP captures a wide variety of contours with a large number of measurement points.

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